pARTS FOR KDNS DNS
DNS INVENTORY LIST NO Part Number Description OEM PART NO Qty1 KMFA-046095 QUARTZ WAFER GUIDE 12 W-39-16489 MFC CONTROLLER DFC4000-2CH-H-RS232C 13 2-VC-25729 EEW IMAGE SENSOR CONTROLLER EEUE-001X3 24 S-39-80028 DHM DC POWER SUPPLY "200W-12V DH-2000D" 25 S-39-80033 DHM DC POWER SUPPLY "200W-24V DH-2000B 26 S-VC-80160-1 PMC CPU BOARD(P6) SBC-551 17 S-39-80040 TMC 제어기용 S.M.P.S NSI-02A 28 2-39-45432 "CP POWER SUPPLY M/N: 49330102000" MR-2015A 28 2-39-41405 MOTOR DRIVE(LOW) D1810-5/CERD-8012 110 2-39-44465 MOTOR DRIVE(HIGH) ***DISCONTINUED*** "CERD-8012X2 D2020-1" 111 S-39-80022 SAMSUNG FARA AC SERVO DRIVER CSD-02BB1P,200W 212 S-39-80342 SAMSUNG FARAcon SERVO DRIVER CSDJ-04BX1 213 S-39-80021 SAMSUNG FARA AC SERVO DRIVER CSD-01BB1P,100W 214 S-39-80021-1 SAMSUNG AC SERVO DRIVER (IND Z) CSDJ-01BX1,100W 315 S-VC-80179-2 ID,TR CONTROLLER BASIC ASS'Y K-8,ID,TR(SRC+) 116 7-39-07671 BELT(ORIGINAL CODE 7-39-27671) 100-L-0800A-L(30M=1SET 117 S-39-A0046 TMC CONTROLLER TMC CONTROL SET 118 KSPI-040297 "CIRCULATOR Komatsu Electronics" NE-363C-7-SA 119 2-VC-21717 PORTABLE MAIN PANEL EEMP-0212 120 5-39-05731 PHOTOELECTRONIC SENSOR SS10-T48 121 S-39-80020 FARA AC SERVO DRIVER CSD-A5BB1P,50W 122 S-39-80021-1 AC SERVO DRIVER (IND Y) CSDJ-02BX1,200W 223 S-39-80099 SAMSUNG FARAcon SERVO DRIVER 600W CSDJ-06BX1 224 W-39-20367 BASE UNIT CS1W-BC103 125 2-39-45661 LPAH PRESSURE SENSOR VPS-D-760TORR-3SA-5ST-HLL 226 2-39-52445 5-PHASE DRIVER UDK5128N-M-G17 427 5-39-01071 AIR VALVE AS-5260-31-CIW 128 5-39-01193 AIR VALVE SAV-3260-CI5A 129 5-39-01704 HA-FE23B 130 5-39-02317 STEEL COUPLING MSTS-40(14*14)(STOCKER) 531 5-39-00910 "METERING PUMP ***DISCONTINUED***IWAKI Metering Pump" "EX-C45FF-100 S27 EX-C45FF-100S27" 1 5-39-01946 Komatsu Electronics DR-631-B DR-631-B 132 5-39-01332 HF COCENTRATION METER IN LINE SENSOR PIRROR CM-110 MONITOR IN LINE SENSOR 233 2-39-48603 "HARD DISK DRIVER ***DISCONTINUED*** NEC " FC-9801B-HD1 134 2-39-55361 FILTER UNIT AP-06 235 2-VC-21716 PORTABLE MAIN PANEL CEMP-0115 136 W-39-11691 Iwaki MAGNETIC PUMP MD-20RM-220N 136 W-39-11701 "SMC Corporation MANIFORD(DRYER)" 10-VV5Q11-03C4FS2-N 138 2-VC-21126 D-SONIC IFC BOX 9EMH-0015 139 5-39-02738 CYLINDER(WAFER SLOT MISS CHECK) MGCLB25-75-R-C73L 240 7-39-33522 SEQUENCE I/O UNIT A42XY 141 7-39-33760 REMOTE I/O BOARD AJ35TF-56DT-SI 32/34 142 7-39-33761 REMOTE I/O BOARD AJ35TF-32DT-SI 16/16 143 7-39-33937 TEMP.CONTROL BOARD ***DISCONTINUED*** DSX-C400-V1 PT 4POINT 144 W-39-11695 PURGE METER FW-1125-LO-6N-N2/50LPM 145 5-39-02013 HF CONCENTRATION SENSOR CM-210 246 7-39-30834 OUTPUT UNIT 64 POINTS TYPE AY42 147 2-39-45634 MITSUBISHI AC SERVO MOTOR (Y) HA-FE23D 147 2-39-45689 MITSUBISHI AC SERVO MOTOR (Y) HA-FE13D 100W 149 2-39-49900 MOTOR DRIVER CSD5814VN(EEW Y-AXIS) 4 DFC1514 "VEXTA DIRVER BOARD Oriental Motor.Co." 450 S-39-00725 TCU TEMP/HUMI CONTROLLER SDC40S 251 5-F1-01208 BATH FOR SC-1(W-F1-01208 NEW) QUARTZ 252 KSPI-038126 QUARTZ INLINE HEATER 153 "2-39-45431 MODEL:12006107000" "CP CONTROLLER POWER SUPPLY" FRD-4 154 S-VC-80098-1 ROBOT DRIVER ASS'Y ROBOT(SCR+) 155 S-VC-80144-2 PMC-A(SC,SD,EEW) PMC CONTROLLER(HALF) 156 S-VC-80147-2 PMC-B BAKE CONTROLLER(HALF) 157 2-VC-16217-2 HEAT CONTROLLER EEBH-0011X1(80B) 258 S-VC-80151 TMC CONTROLLER INDEXER CONTROL 159 S-29-80167 PARALLEL DIGIT INPUT BOARD PI 64L(ISA FORM)64IN 260 S-29-80168 PARALLEL DIGIT INPUT BOARD PO 64L(ISA FORM)64OUT 261 S-VC-80171 PMC I/O BOARD PMC I/O 2REV:2.0 2 S-VC-80171-1 PMC I/O BOARD-A PMC I/O 2REV:2.2 262 S-VC-80172-1 PMC I/O BOARD-B PMC I/O 4REV:2.2 263 S-VC-80233 BASE 8SLOT BOARD ISA 164 S-VC--80166 SYS BOARD TMC 165 S-VC-80233-1 BASE 10SLOT BOARD ID/TR SRC+(7ISA+SPCI+1PISA) 166 S-VC-80162 MMC BOARD MMC-BDPV41, 4AXIS 167 S-VC-80162-4 MMC BOARD ROBOT MMC 4-AXIS(HALF) 168 S-VC-80166-1 MMC I/O BOARD TMC(SRC+) 269 S-VC-80167 USER I/O BOARD TMC 170 W-39-20351 FLOW METER 4400-MI-FO2-BO6-A-P1-U1 271 0-39-04084 TIMING BELT (O.F ROLLER) 90MXL6.4U 172 2-39-02599 SMC SI UNIT EX110-SMB2 173 2-39-04015 SYNCHRO BELT 170XL037U(IND Y-AXIS) 174 2-39-33495 VACUUM SOLENOID VALUE V050E1-5W 175 2-39-34434 5-PHASE DRIVER ***DISCONTINUED*** UDX5114 176 2-39-42628 FIBER PHOTOELECTRIC SENSOR FS2-62 177 2-39-47980 ARM CENTERING CYLINDER CDQ2B12-5DC-J79C-XB9 178 2-39-54446 BEAM SENSOR CONTROLLER Z4LC-CD2 179 2-39-55315 DC POWER SUPPLY P50-24-N 180 2-F3-38968 LM GUIDE LWL12C1R350E152 181 5-39-03667 CLEARSEP CAPSULE FILTER DS09X 182 5-39-50590 PDP CABLE(LM-PDP) ***DISCONTINUED*** LC 20 DV1 183 5-39-UL006 INDUCTION MOTOR OIKIGN-AUL 184 7-39-13433 AIR OPERATE VALVE AV-4242-115M6 185 7-39-24566 STAINLESS REDUCING VALVE INA-13-746-03 186 7-39-28721 AIR VALVE DS-7270-131ZH 187 S-AJ-80339 ID ARM (LARGE SIZE) 488 S-F4-51042 GUIDE 189 W-39-20350 ELECTRIC AIR REGULATOR ITV2030-042CL2 290 W-39-20358 MANUAL VALVE 1/2" 3-WAY D8-3Q-8F 191 2-VC-18987-3 EEW BOARD EEUC-0013 (80B) 292 2-VC-19089 ID-A BOARD EEDC-0011 (80B) 293 2-VC-19090 TRANSPORT BOARD EERC-0011 (80B) 394 2-VC-19116 BAKE BOARD EEBC-0012 (80B) 295 2-VC-09977-1 PARALLER I/O BOARD CEMI-0011 (80A,B) 496 5-39-04481 WAFER COUNTER ASW-U826-8 197 S-VC-80163 MFB BOARD MULTI FUNCTION BOARD 298 W-39-60549 VACUUM REGULATOR ITV2010-02N2BL4 299 2-39-51785 TCU TEMPERATURE CONTROLLER F900FD04-V GN-NN5-5A 1100 2-39-54445 VIDEO MEASURE SENSOR 3*2CA-PLC8-10M 1101 W-39-20366 FLOW CONTROLLER E5EK 2102 W-39-20254 FLOW SENSOR KIT(DRYER) 3-8512-TO-16-B7-1-FT 1103 W-39-20255 CONDUCTIVITY KIT(DRYER) 3-2819-1M-15-CRT(MONEL) 1104 W-39-20362 1/4 TURN MANUAL 1/4" 620394 2105 W-39-20369 POWER SUPPLY S82J30024 1106 W-39-20382 PLC CPU UNIT CS1G-CPU44H 1107 KMFA-286201 UPPER VAT LEFT 1108 KMFA-286202 UPPER VAT RIGHT 1109 S-39-00436 FARA AC SERVO MOTOR CSM-02BB1A,200W 1110 S-39-00437 FARA AC SERVO MOTOR CSM-04BB2A,400W 1111 W-49-00507 Y-AXIS DRIVER(2-39-52445)(W-39-50031) UDK5128NW2-M 1112 S-39-80046 MULTI-8 RS422 1113 2-F1-31286 BACK SIDE COVER 2-FI-21286 2114 S-39-00359 FARA AC SERVO MOTOR CSM-A5BBI ANT3 1 FLUKE 80i-600A FLUKE CURRENT TRANSFORMER 2115 S-39-00360 FARA AC SERVO MOTOR CSM-A2BBI ANT3 2116 S-VC-80165 CPU BOARD TMC 3117 S-VC-80172 PMC I/O BOARD PMC I/O 4 REV:2.0 1118 S-VX-15048-3 A/D RGB CONVERTER 1119 W-39-20364 PRESSURE SENSOR 4210-60G-FO4-B12-A-P1-U1 2120 W-39-11792 AIR OPERATE VALVE LVO60-S25N-3 1121 W-39-20360 AIR VALVE 1/2" 202-66-01 1122 W-39-20363 AIR VALVE 1/4" 202-179--01 2123 2-XB-10024 HORIZENTAL AXIS KIT CABLE KIT 1124 2-XB10027 VERTICAL AXIS KIT CABLE KIT 2125 5-39-14171 ADJUSTMENT TOOL(OLD:5-39-07607 CALIBRATION UNIT) K-P-T2(KTTK/K/0004) 1126 5-39-50171-UL AC SERVO MOTOR ***DISCONTINUED*** HA-FE23B-UL 1127 7-39-02928 AIR VALVE DS-7270-131H-4 1128 W-39-11686 SLIDE RAILS C-359-50 1129 W-39-20258 REGULATOR REDUCING(DRYER) 64-2662KRM21 1130 W-39-20371 N2 REGULATOR 74-2462KRT21 1131 W-39-2-373 LOAD CELL PLS100L-300 1132 W-39-50034 STEPPING MOTOR(SHUTTLE LEFT/RIGHT) UPK564AW-A11(WITH DRIVER) 1133 S-39-00443 FAN MD825B-24L 2134 S-39-00444 FAN MDS410-24 2135 S-39-00451 DIGITAL JOG FARA CST-SDI 1136 2-39-46193 STOP VALVE(MAIN THINNER/DEV용) PSSP-M8B 2137 2-39-53628 SOLENOID VALVE USB3-6-3-E-24 1138 2-39-54143 SOLENOID VALVE AB42-02-7-E3A, DC24V 1139 2-39-46052 TUBING 2.5MM 1140 2-39-30962 O-RING P-6 70"(WHITE SILICON) 10141 2-39-05923 REGULATOR INA-13-707 1142 2-39-06099 VACUUM GAUGE 76CMHG 1143 2-39-06109 GAUGE(N2용) 3KGF/CM2-ADMU PT14 2144 2-39-49252 PNEUMATIC CYLINDER CDQSB25CJ3173XC10 A90L-6 1145 2-39-50147 PRESSURE SENSOR KL77 0.5MP TEFLON 1146 S-VC-80167-3 USER I/O BOARD ROBOT(SRC+) 2147 W-39-20361 1/4 TURN MANUAL 1/2" 201-37-01 1148 S-VC-80161 LAN BOARD(E-NET) JI58013EWC 1149 7-39-30845 SEQUENCE A/D CONVERTER A68AD 1150 7-39-05039 SI UNIT MAIFOLD VV5J3-32P-06-C4-X184 1151 5-V6-00010 REMOTE CONTROL BOX 1152 5-FA-02327-A TEMPERRATURE ELEMENT PT100 1153 W-49-01041 INPUT UNIT C200H-ID217 1154 2-SS-00086 KG5025 KG5025 2155 A-01-00398 LINK CARD CS1W-CLK21 1156 W-39-20368 POWER UNIT C200H-PA204S 1157 W-49-01191 OMRON OUTPUT 64POINT C200H OD219 1158 S-39-80071-1 E2 CABLE(DEVELOP) SAL26<>SAL27 1159 S-L3-80121-1 CABLE IFC<->TMC (RCN1) 1160 S-L3-80137 MFB TO I/O CABLE WIRING PMC 1161 W-39-11693 PNEUMATIC VALVE(N/C) FPR-91-12.7 1162 W-39-11694 PNEUMATIC METER FP-91-12.7 1163 W-39-11702 SOLENOID VALVE(DRYER) VQ1101-5(SINGLE) 1164 5-39-05125 CYLINDER(WAFER SLOT MISS CHECK) CDJ2L16-200-C73L 1165 5-39-01028 TIMING BELT (SHUTTLE LEFT/RIGHT) 128XL-050U 7166 5-39-02557 SENSOR GSZ3RS 1167 5-39-00811 AIR VALVE SAV-3260-131CIZ 2168 5-39-00810 AIR VALVE SAV-3260-131TIZR 1169 7-39-34039 SEQUENCER MEMORY CASSETTE A3NMCA-24R 1170 7-39-34026 TERMINAL RELAY MY 4N-CR(100V) 2171 7-39-34346 LEVEL SENSOR DSX-L48(OLD5-39-51540) 1172 S-39-80071-C E2 CABLE COATER(OLDS-39-80071) 3173 S-39-80073 MOTOR CABLE(COATER) SAL29<->SAL30 1174 S-39-80073-1 MOTOR CABLE(DEVELOP) SLA29<->SAL30 3175 2-F4-92587 NOZZLE PR ,(IWAKI) 10176 KSPI-050184 O RING 4177 S-39-00433 SENSOR EE-SX671A 18178 S-39-00440 BELT 128A-10T,32*2800 1179 S-39-10070 TEMP,HUMI SENSOR(COATER) RHT-PT 1180 S-39-80218-1 PMC COOLING FAN 3110-PL-04W-B30-A00 1181 S-39-00435 TIMING BELT S3MO100,1200MM 6182 S-39-80041 SMPS(12.24V) PMC I/O BOX 1183 S-39-00452 HANDY TERMINAL M-FHT11 1184 W-39-TC-003 MANUAL VALVE AM5269-131C 3185 2-F4-91710 RIGHT CASSETTE GUIDE 40186 5-39-52119 AC SERVO MOTOR DRIVER ***DISCONTINUED*** MR-J20A1-UL 1187 5-39-50156 OVERHEAT DETECTION CIRCUIT BOARD DSC-002 1188 5-39-50571 SWITCH M-2021E 1189 5-39-51288 MAGNETIC SWITCH S-N20(AC200V) 3190 S-F4-51772 ARM BASE2 (TR LOWER) A7075-T651 1191 S-F4-51041 PULLEY X-2 6192 2-L4-24993 CIRCULATOR TEMP SENSOR CABLE CIRCULATOR&TEMP SENSOR 4193 2-AJ-90757 VACCUMLESS GUIDE S91A-1008 2194 2-F3-34848 SPIN CHUCK EEW 40MM 1195 2-39-55678 I/O UNIT C20HB-MD211 1196 2-F4-85028 SECTOR 2197 W-49-01878 VARITAP(VP-05C)(DRYER) SINGLE 220V,60HZ,5A 1198 W-49-00041 TERMINAL BLOCK UK60 8199 Z-39-21627 VCR GASKET 1/2" SS-8-VCR-2-VS 1200 Z-39-21628 VCR GASKET 1/4" SS-4-VCR-2-VS 1201 0-39-12499 BEARING 600-2Z 3202 5-F3-00650 BRACKET FRONT 1203 5-F3-08613 GASKET 1204 7-39-30869 BATTERY ER17330V(3.6V) 3 "New Power Electronics- 뉴파워전자Power Supply" NSI-02D 1 12612G01 BROOKS Automation Flow Controller Sentry 1000 EQ-131AD-D Melco Technorex EQ-131AD-D EQ-131AD-D 1 P/N 02-034310-00 Novellus P100 Module Econtroller