pARTS FOR SURFSCAN 6200 6220 6420

	PART #	DESCRIPTIONAnalog	531430	Analog NAT IC	        0069282-000	AnalogBW	        187151	Below Wafer Detector PCB	        318809	Below Wafer Detector PCBCPU	535893	CPU 75MHz, 32MB RAM, Bios V8 KIT	        0057977-000	CPU, Pentium, 200 MHz MMXGPIO	238740	General Purpose I/OHard Disk	547310	Hard Disk, 4.3GB, IDE Seagate	350320	Hard Disk, 2.15GB, SCSI Quantum	513385	Hard Disk 4.3 GB, SCSI Quantum	0044808-000	Hard Disk 9.1 GB, Seagate SCSIHaze	509469	Haze Separator Piggy-back Kit	        357464	Haze Separator RVFMotor	198331	4 Channel Motor Controller	        163996	Motor Distribution	        533645	4 Channel Power Motor DriverParticle	164453	Particle Processor	         273163	Particle Area ProcessorPMT   	177415	PMT Preamp	        272935	PMT PreampTG	       345253	Timing Generator EMI (Prime)	         277266	Timing Generator (Prime)VGA	442127	VGA (Prime)	0057860-000	VGA JATON VIDEO-88PCI-16,16MB	233676	Keyboard Interface	357995	SMC, Elite 16C Ultra	191299	Backplane 14 Slots (Obsolete)	239704	INSW Interface	163473	Power Backplane	134384	CCM/Focus Buffer	290823	ISA/PCI, 13 Slots Backplane	162698	Below Wafer Detector (Laser ON Detector)	289558	Power Distribution	371866	X-AxisMotor	153869	Sort CAM	111945	CCM, 24V	276618	FOCUS	371874	Indexer Motor	113115	Pol Collector	271900	Reflector, Tile, CCM, Silicon	250767	EDS, 3604	0033951-000	EDS, 4604